Replicating polymer micro-fluidic devices using laser-fabricated glass-ceramic stamps

Joohan Kim, Xianfan Xu

Research output: Contribution to journalConference articlepeer-review

Abstract

Laser-based mass production of micro structures may not be suitable in many cases because it is a serial process: devices are fabricated one by one only. Replication techniques for fabricating nano/micro structures have been investigated and developed for a long time and in our work, we present replicating micro structures in polymers using laser fabricated glass-ceramic stamps. A micro stamping process applying heat and pressure, also referred to as hot embossing, can replicate micro structures on polymer surfaces. By reforming thermoplastics, micro features can be transferred to polymer surfaces. Hot embossing normally employs metal or silicon stamps. In this work, we use a glass-ceramic stamp which can be easily and quickly fabricated with a laser-based pattern transferring technique. In addition, a micro stamping device has been designed and developed for this process. Many micro structures such as micro channels, capillaries, and micro diffusers are produced and the advantages of this process are discussed.

Original languageEnglish
Article number21
Pages (from-to)129-134
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5662
DOIs
StatePublished - 2004
EventFifth International Symposium on Laser Precision Microfabrication - Nara, Japan
Duration: 11 May 200414 May 2004

Keywords

  • Excimer laser
  • Glass-ceramics
  • Hot embossing
  • Laser micro-fabrication
  • Polymer

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