Replication of microchannel structures in polymers using laser fabricated glass-ceramic stamp

A new microreplication process with photo-etchable glass-ceramic stamps and polymers is presented. This process has two main advantages: a rapid master fabrication with a laser process and a flexible replication process compared with conventional nano- or microreplication technique on polymers. Photo-etchable glass-ceramics are used for the master stamp. Micropatterns can be rapidly transferred with a laser direct writing process and the removal of the glass-ceramics can be efficiently achieved with a wet etching process. Therefore, microstructures with flat bottom surfaces and straight sidewall structures can be obtained, which is difficult in the laser direct writing process. A microstamping process of applying heat and pressure, also referred to as hot embossing lithography or microstamping, can replicate microstructures on polymer surfaces. In this work, the fabricated glass-ceramic stamps are used for the replication process and various replicated polymer microstructures are presented.