Research on Sensor Functionality of Next-generation Intelligent Semiconductor Devices using Ga2 O3-based UV-C Detector Under Commercial Conditions

Hak Jun Ban, Seung Won Lee, Wan Sik Hwang, Seul Ki Hong

Research output: Contribution to journalArticlepeer-review

Abstract

This study proposes sensor components that can be created using temperature-restricted processes, considering a monolithic 3D system structure for the configuration of next-generation intelligent semiconductor systems. We developed a UV-C detecting sensor using Ga2O 3 and successfully demonstrated its functionality. Unlike conventional-methods that relied on high voltage and intense UV-C radiation for sensing, our research proved that sensing is achievable with significantly lower voltage and intensity. These innovative results are not limited to advanced packaging and sensor fields but can also be applied across various research areas within the semiconductor industry. Furthermore, the flexible manufacturing approach presented in this study holds great potential not only for industrial applications but also for experimentation and research in academia and research institutions. Therefore, the outcomes of this study are anticipated to drive innovative advancements in the semiconductor industry and have a significant societal and economic impact through their applicationacross diverse fields.

Original languageEnglish
Pages (from-to)373-378
Number of pages6
JournalJournal of Semiconductor Technology and Science
Volume24
Issue number4
DOIs
StatePublished - Aug 2024

Keywords

  • Ga2O3
  • intelligent semiconductor
  • semiconductor device
  • sensor
  • UV-C

Fingerprint

Dive into the research topics of 'Research on Sensor Functionality of Next-generation Intelligent Semiconductor Devices using Ga2 O3-based UV-C Detector Under Commercial Conditions'. Together they form a unique fingerprint.

Cite this