@inproceedings{b792d0fa385b4c938e075b1b777b17fd,
title = "Silicon nanowire based ring shape force sensor for sensorized guidewires",
abstract = "This paper presents the development of a ring shaped force sensor for sensorized guidewire applications. The sensor comprises a suspended ring structure located at the center of four suspended beams that can be integrated on the distal tip of a guidewire. SiNWs with a length of 6 μm and a cross section of 90 nm × 90 nm are embedded at the anchor of each silicon bridge as the piezoresistive sensing elements. Taking advantage of the high sensitivity of SiNWs, the fabricated sensor was capable to detect small displacement in nm ranges with a sensitivity of 13.4 × 10-3 μm-1 in the z-direction. This force sensor showed high linearity (>99.9\%) to the applied load and no obvious hysteresis was observed.",
keywords = "guidewire, minimally invasive surgery, Silicon nanowire, triaxial force sensor",
author = "B. Han and Yoon, \{Y. J.\} and M. Hamidullah and Lin, \{A. T.H.\} and Park, \{W. T.\}",
year = "2013",
doi = "10.1109/Transducers.2013.6626867",
language = "English",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "718--721",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}