TY - GEN
T1 - Simple and fast polydimethylsiloxane (PDMS) patterning using a cutting plotter and vinyl adhesives to achieve etching results
AU - Kim, Hyun
AU - Yoo, Sun Young
AU - Kim, Ji Sung
AU - Wang, Zihuan
AU - Lee, Woon Hee
AU - Koo, Kyo In
AU - Seo, Jong Mo
AU - Cho, Dong Il
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/9/13
Y1 - 2017/9/13
N2 - Inhibition of polydimethylsiloxane (PDMS) polymerization could be observed when spin-coated over vinyl substrates. The degree of polymerization, partially curing or fully curing, depended on the PDMS thickness coated over the vinyl substrate. This characteristic was exploited to achieve simple and fast PDMS patterning method using a vinyl adhesive layer patterned through a cutting plotter. The proposed patterning method showed results resembling PDMS etching. Therefore, patterning PDMS over PDMS, glass, silicon, and gold substrates were tested to compare the results with conventional etching methods. Vinyl stencils with widths ranging from 200μm to 1500μm were used for the procedure. To evaluate the accuracy of the cutting plotter, stencil designed on the AutoCAD software and the actual stencil widths were compared. Furthermore, this method's accuracy was also evaluated by comparing the widths of the actual stencils and etched PDMS results.
AB - Inhibition of polydimethylsiloxane (PDMS) polymerization could be observed when spin-coated over vinyl substrates. The degree of polymerization, partially curing or fully curing, depended on the PDMS thickness coated over the vinyl substrate. This characteristic was exploited to achieve simple and fast PDMS patterning method using a vinyl adhesive layer patterned through a cutting plotter. The proposed patterning method showed results resembling PDMS etching. Therefore, patterning PDMS over PDMS, glass, silicon, and gold substrates were tested to compare the results with conventional etching methods. Vinyl stencils with widths ranging from 200μm to 1500μm were used for the procedure. To evaluate the accuracy of the cutting plotter, stencil designed on the AutoCAD software and the actual stencil widths were compared. Furthermore, this method's accuracy was also evaluated by comparing the widths of the actual stencils and etched PDMS results.
UR - http://www.scopus.com/inward/record.url?scp=85032217356&partnerID=8YFLogxK
U2 - 10.1109/EMBC.2017.8037215
DO - 10.1109/EMBC.2017.8037215
M3 - Conference contribution
C2 - 29060259
AN - SCOPUS:85032217356
T3 - Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS
SP - 1885
EP - 1888
BT - 2017 39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2017
Y2 - 11 July 2017 through 15 July 2017
ER -