@inproceedings{b3deec5e2a5842c0a9092dc4a562c512,
title = "Simulation to compensate ripple of air bearing stage with flexure hinge mechanisms",
abstract = "This letter suggests a method to improve tracking performance of an H-type XY stage with air bearings and flexure hinge mechanisms. The flexure hinge mechanisms are employed to prevent failure of the air bearings when the yaw motion error of the H-type stage is controlled using a control algorithm called gantry control. Adoption of the flexure hinge mechanism combined with the gantry control leads to occurrence of mutual ripple. Ripple should be handled to obtain good tracking performance. Modeling of the mutual ripple and simulation of two compensation algorithms are presented.",
keywords = "Flexure hinge, Gantry control, Mutual ripple, Precision stage, Yaw",
author = "Dahoon Ahn and Daegab Gweon and Dongpyo Hong",
year = "2011",
doi = "10.4028/www.scientific.net/AMR.301-303.1795",
language = "English",
isbn = "9783037851975",
series = "Advanced Materials Research",
pages = "1795--1799",
booktitle = "Advanced Measurement and Test",
note = "2011 2nd International Conference on Advanced Measurement and Test, AMT 2011 ; Conference date: 24-06-2011 Through 26-06-2011",
}