TY - JOUR
T1 - Single-step manufacturing of hierarchical dielectric metalens in the visible
AU - Yoon, Gwanho
AU - Kim, Kwan
AU - Huh, Daihong
AU - Lee, Heon
AU - Rho, Junsuk
N1 - Publisher Copyright:
© 2020, The Author(s).
PY - 2020/12/1
Y1 - 2020/12/1
N2 - Metalenses have shown a number of promising functionalities that are comparable with conventional refractive lenses. However, current metalenses are still far from commercialization due to the formidable fabrication costs. Here, we demonstrate a low-cost dielectric metalens that works in the visible spectrum. The material of the metalens consists of a matrix-inclusion composite in which a hierarchy satisfies two requirements for the single-step fabrication; a high refractive index and a pattern-transfer capability. We use a UV-curable resin as a matrix to enable direct pattern replication by the composite, and titanium dioxide nanoparticles as inclusions to increase the refractive index of the composite. Therefore, such a dielectric metalens can be fabricated with a single step of UV nanoimprint lithography. An experimental demonstration of the nanoparticle composite-based metalens validates the feasibility of our approach and capability for future applications. Our method allows rapid replication of metalenses repeatedly and thereby provides an advance toward the use of metalenses on a commercial scale.
AB - Metalenses have shown a number of promising functionalities that are comparable with conventional refractive lenses. However, current metalenses are still far from commercialization due to the formidable fabrication costs. Here, we demonstrate a low-cost dielectric metalens that works in the visible spectrum. The material of the metalens consists of a matrix-inclusion composite in which a hierarchy satisfies two requirements for the single-step fabrication; a high refractive index and a pattern-transfer capability. We use a UV-curable resin as a matrix to enable direct pattern replication by the composite, and titanium dioxide nanoparticles as inclusions to increase the refractive index of the composite. Therefore, such a dielectric metalens can be fabricated with a single step of UV nanoimprint lithography. An experimental demonstration of the nanoparticle composite-based metalens validates the feasibility of our approach and capability for future applications. Our method allows rapid replication of metalenses repeatedly and thereby provides an advance toward the use of metalenses on a commercial scale.
UR - https://www.scopus.com/pages/publications/85084720463
U2 - 10.1038/s41467-020-16136-5
DO - 10.1038/s41467-020-16136-5
M3 - Article
C2 - 32385266
AN - SCOPUS:85084720463
SN - 2041-1723
VL - 11
JO - Nature Communications
JF - Nature Communications
IS - 1
M1 - 2268
ER -