Abstract
The hysteresis behavior of charges was observed in Capacitance-Voltage (C-V) curve characteristics of fluorinated polyimide film in MPS (Cu-fluorinated polyimide film-Si) test structure. The degree of hysteresis was almost constant up to 150°C and then sharply increased beyond 150°C. Hysteresis behavior up to 150°C was due to a fixed amount of mobile charges at the interface between fluorinated polyimide film and Si and one beyond 150°C was due to abrupt increase of mobile charges and their enhanced movement in the bulk of fluorinated polyimide film due to structural transition of fluorinated polyimide film.
| Original language | English |
|---|---|
| Pages (from-to) | 445-449 |
| Number of pages | 5 |
| Journal | Modern Physics Letters B |
| Volume | 20 |
| Issue number | 8 |
| DOIs | |
| State | Published - 30 Mar 2006 |
Keywords
- Capacitance-voltage
- Flat band voltage
- Fluorinated polyimide
- Hysteresis
- Interlayer dielectric
- ULSI