Surface modification and characterization of electrosprayed Sn-doped In₂O₃ thin films

We synthesized Sn-doped In₂O₃ (Indium tin oxide, ITO) thin films using electrospray and spincoating. Scanning electron microscopy, atomic force spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy, Hall-effect measurement, and UV-vis spectrophotometry measurements were performed to investigate the morphological, structural, chemical, electrical, and optical properties of the electrosprayed ITO films with a sol-layer coating for surface modification. To obtain the optimum performance of the resultant ITO thin films after surface modification, we heat-treated them at four different temperatures of 450°C (sample A), 550°C (sample B), 650°C (sample C), and 750°C (sample D) using microwave heating. Surface modified ITO thin films calcined at 550°C (sample B) using electrospray and spin-coating are observed to have superior resistivity (9.9 × 10^-3 Ω·cm) and optical transmittance (∼92.08%) owing to the improved densification of the ITO surface by spin-coating and the formation of uniform ITO thin films by electrospraying.