TY - JOUR
T1 - Surface modification and characterization of electrosprayed Sn-doped In2O3 thin films
AU - Koo, Bon Ryul
AU - Ahn, Hyo Jin
N1 - Publisher Copyright:
Copyright © 2014 American Scientific Publishers. All rights reserved.
PY - 2014/12/1
Y1 - 2014/12/1
N2 - We synthesized Sn-doped In2O3 (Indium tin oxide, ITO) thin films using electrospray and spincoating. Scanning electron microscopy, atomic force spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy, Hall-effect measurement, and UV-vis spectrophotometry measurements were performed to investigate the morphological, structural, chemical, electrical, and optical properties of the electrosprayed ITO films with a sol-layer coating for surface modification. To obtain the optimum performance of the resultant ITO thin films after surface modification, we heat-treated them at four different temperatures of 450°C (sample A), 550°C (sample B), 650°C (sample C), and 750°C (sample D) using microwave heating. Surface modified ITO thin films calcined at 550°C (sample B) using electrospray and spin-coating are observed to have superior resistivity (9.9 × 10-3 Ω·cm) and optical transmittance (∼92.08%) owing to the improved densification of the ITO surface by spin-coating and the formation of uniform ITO thin films by electrospraying.
AB - We synthesized Sn-doped In2O3 (Indium tin oxide, ITO) thin films using electrospray and spincoating. Scanning electron microscopy, atomic force spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy, Hall-effect measurement, and UV-vis spectrophotometry measurements were performed to investigate the morphological, structural, chemical, electrical, and optical properties of the electrosprayed ITO films with a sol-layer coating for surface modification. To obtain the optimum performance of the resultant ITO thin films after surface modification, we heat-treated them at four different temperatures of 450°C (sample A), 550°C (sample B), 650°C (sample C), and 750°C (sample D) using microwave heating. Surface modified ITO thin films calcined at 550°C (sample B) using electrospray and spin-coating are observed to have superior resistivity (9.9 × 10-3 Ω·cm) and optical transmittance (∼92.08%) owing to the improved densification of the ITO surface by spin-coating and the formation of uniform ITO thin films by electrospraying.
KW - Electrospray
KW - Microwave heating
KW - Sn-doped Ino
KW - Spin-Coating
KW - TCO
UR - https://www.scopus.com/pages/publications/84910635263
U2 - 10.1166/jnn.2014.10150
DO - 10.1166/jnn.2014.10150
M3 - Article
C2 - 25971111
AN - SCOPUS:84910635263
SN - 1533-4880
VL - 14
SP - 9632
EP - 9636
JO - Journal of Nanoscience and Nanotechnology
JF - Journal of Nanoscience and Nanotechnology
IS - 12
ER -