Symmetric AFM cantilever for mechanical characterization of Mo thin film

Hak Joo Lee; Jae Hyun Kim; Kiho Cho; Jae Yoon Kang; Chang Wook Baek; Jong Man Kim; Sung Hoon Choa

doi:10.1142/s0217979206040362

Symmetric AFM cantilever for mechanical characterization of Mo thin film

Hak Joo Lee, Jae Hyun Kim, Kiho Cho, Jae Yoon Kang, Chang Wook Baek, Jong Man Kim, Sung Hoon Choa

Dept. of Semiconductor Engineering

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

We have developed a novel method and device for measuring the mechanical properties of micro/nano structures. An atomic force microscope (AFM) was employed to sense applied force and displacement and a new AFM cantilever which overcame the critical problems associated with conventional AFM cantilever systems was fabricated using single crystal silicon (110). The symmetrically designed cantilever removed lateral motion of the probe during indentation and strip bending tests. Strip bending tests on fixed-fixed molybdenum (Mo) strips 1 μm in thickness using the assembled cantilever in AFM system showed that consistent load-displacement curves can be obtained. The effect of adhesive energy on mechanical tests in micro/nano-scale was revealed.

Original language	English
Pages (from-to)	3781-3786
Number of pages	6
Journal	International Journal of Modern Physics B
Volume	20
Issue number	25-27
DOIs	https://doi.org/10.1142/s0217979206040362
State	Published - 30 Oct 2006

Keywords

Atomic force microscope (AFM)
Mechanical characterization
Molybdenum (Mo)
Rhombus-shaped cantilever
Strip bending test
Thin film

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10.1142/s0217979206040362

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abstract = "We have developed a novel method and device for measuring the mechanical properties of micro/nano structures. An atomic force microscope (AFM) was employed to sense applied force and displacement and a new AFM cantilever which overcame the critical problems associated with conventional AFM cantilever systems was fabricated using single crystal silicon (110). The symmetrically designed cantilever removed lateral motion of the probe during indentation and strip bending tests. Strip bending tests on fixed-fixed molybdenum (Mo) strips 1 μm in thickness using the assembled cantilever in AFM system showed that consistent load-displacement curves can be obtained. The effect of adhesive energy on mechanical tests in micro/nano-scale was revealed.",

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AU - Lee, Hak Joo

AU - Kim, Jae Hyun

AU - Cho, Kiho

AU - Kang, Jae Yoon

AU - Baek, Chang Wook

AU - Kim, Jong Man

AU - Choa, Sung Hoon

PY - 2006/10/30

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N2 - We have developed a novel method and device for measuring the mechanical properties of micro/nano structures. An atomic force microscope (AFM) was employed to sense applied force and displacement and a new AFM cantilever which overcame the critical problems associated with conventional AFM cantilever systems was fabricated using single crystal silicon (110). The symmetrically designed cantilever removed lateral motion of the probe during indentation and strip bending tests. Strip bending tests on fixed-fixed molybdenum (Mo) strips 1 μm in thickness using the assembled cantilever in AFM system showed that consistent load-displacement curves can be obtained. The effect of adhesive energy on mechanical tests in micro/nano-scale was revealed.

AB - We have developed a novel method and device for measuring the mechanical properties of micro/nano structures. An atomic force microscope (AFM) was employed to sense applied force and displacement and a new AFM cantilever which overcame the critical problems associated with conventional AFM cantilever systems was fabricated using single crystal silicon (110). The symmetrically designed cantilever removed lateral motion of the probe during indentation and strip bending tests. Strip bending tests on fixed-fixed molybdenum (Mo) strips 1 μm in thickness using the assembled cantilever in AFM system showed that consistent load-displacement curves can be obtained. The effect of adhesive energy on mechanical tests in micro/nano-scale was revealed.

KW - Atomic force microscope (AFM)

KW - Mechanical characterization

KW - Molybdenum (Mo)

KW - Rhombus-shaped cantilever

KW - Strip bending test

KW - Thin film

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DO - 10.1142/s0217979206040362

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JO - International Journal of Modern Physics B

JF - International Journal of Modern Physics B

IS - 25-27

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Symmetric AFM cantilever for mechanical characterization of Mo thin film

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