Synthesis of Mono-Imido Tungsten Complexes Directly from WCl6

Sheby Mary George; Jeong Hwan Han; Bo Keun Park; Chang Gyoun Kim; Hongseok Jang; Kangyong Lee; Sangjun Yim; Sang Ick Lee; Myongwoon Kim; Taek Mo Chung

doi:10.1002/slct.201500035

Synthesis of Mono-Imido Tungsten Complexes Directly from WCl₆

Sheby Mary George, Jeong Hwan Han, Bo Keun Park, Chang Gyoun Kim, Hongseok Jang, Kangyong Lee, Sangjun Yim, Sang Ick Lee, Myongwoon Kim, Taek Mo Chung

Dept. of Materials Science & Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

A new series of tungsten complexes were prepared using WCl₆, N-tert-butyltrimethylsilylamine, and amide ligands as potential precursors for WN_x thin film deposition. The complexes [W(N^tBu)(NMe₂)₄] (2), [W(N^tBu)(MeNCH₂CH₂NMe)₂] (3), [W(N^tBu)(MeNCH₂CH₂CH₂NMe)₂] (4), [W(N^tBu)(ⁱPrNCH₂CH₂NⁱPr)₂] (5), and [W(N^tBu)(^tBuNCH₂CH₂N^tBu)₂] (6) were prepared by a two-step process. First, the controlled reaction between WCl₆ and N-tert-butyltrimethylsilylamine afforded the complex [W(N^tBu)Cl₄(py)] (1) from which the substitution of chloride ions with the corresponding amide ligands gave complexes 2–6. Single crystal X-ray crystallography showed that complex 1 crystalized in the triclinic space group P-1 with an octahedral structure. Among complexes 2–6, complexes 4 and 5 exhibited good volatility and stability.

Original language	English
Pages (from-to)	44-48
Number of pages	5
Journal	ChemistrySelect
Volume	1
Issue number	1
DOIs	https://doi.org/10.1002/slct.201500035
State	Published - Jan 2016

Keywords

Imido
Precursor
Thin film
Tungsten
WN

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@article{2d14332ed0bb46bda14b998750f4d572,

title = "Synthesis of Mono-Imido Tungsten Complexes Directly from WCl6 ",

abstract = "A new series of tungsten complexes were prepared using WCl6, N-tert-butyltrimethylsilylamine, and amide ligands as potential precursors for WNx thin film deposition. The complexes [W(NtBu)(NMe2)4] (2), [W(NtBu)(MeNCH2CH2NMe)2] (3), [W(NtBu)(MeNCH2CH2CH2NMe)2] (4), [W(NtBu)(iPrNCH2CH2NiPr)2] (5), and [W(NtBu)(tBuNCH2CH2NtBu)2] (6) were prepared by a two-step process. First, the controlled reaction between WCl6 and N-tert-butyltrimethylsilylamine afforded the complex [W(NtBu)Cl4(py)] (1) from which the substitution of chloride ions with the corresponding amide ligands gave complexes 2–6. Single crystal X-ray crystallography showed that complex 1 crystalized in the triclinic space group P-1 with an octahedral structure. Among complexes 2–6, complexes 4 and 5 exhibited good volatility and stability.",

keywords = "Imido, Precursor, Thin film, Tungsten, WN",

author = "George, \{Sheby Mary\} and Han, \{Jeong Hwan\} and Park, \{Bo Keun\} and Kim, \{Chang Gyoun\} and Hongseok Jang and Kangyong Lee and Sangjun Yim and Lee, \{Sang Ick\} and Myongwoon Kim and Chung, \{Taek Mo\}",

note = "Publisher Copyright: {\textcopyright} 2016 WILEY-VCH Verlag GmbH \& Co. KGaA, Weinheim",

year = "2016",

month = jan,

doi = "10.1002/slct.201500035",

language = "English",

volume = "1",

pages = "44--48",

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T1 - Synthesis of Mono-Imido Tungsten Complexes Directly from WCl6

AU - George, Sheby Mary

AU - Han, Jeong Hwan

AU - Park, Bo Keun

AU - Kim, Chang Gyoun

AU - Jang, Hongseok

AU - Lee, Kangyong

AU - Yim, Sangjun

AU - Lee, Sang Ick

AU - Kim, Myongwoon

AU - Chung, Taek Mo

PY - 2016/1

Y1 - 2016/1

N2 - A new series of tungsten complexes were prepared using WCl6, N-tert-butyltrimethylsilylamine, and amide ligands as potential precursors for WNx thin film deposition. The complexes [W(NtBu)(NMe2)4] (2), [W(NtBu)(MeNCH2CH2NMe)2] (3), [W(NtBu)(MeNCH2CH2CH2NMe)2] (4), [W(NtBu)(iPrNCH2CH2NiPr)2] (5), and [W(NtBu)(tBuNCH2CH2NtBu)2] (6) were prepared by a two-step process. First, the controlled reaction between WCl6 and N-tert-butyltrimethylsilylamine afforded the complex [W(NtBu)Cl4(py)] (1) from which the substitution of chloride ions with the corresponding amide ligands gave complexes 2–6. Single crystal X-ray crystallography showed that complex 1 crystalized in the triclinic space group P-1 with an octahedral structure. Among complexes 2–6, complexes 4 and 5 exhibited good volatility and stability.

AB - A new series of tungsten complexes were prepared using WCl6, N-tert-butyltrimethylsilylamine, and amide ligands as potential precursors for WNx thin film deposition. The complexes [W(NtBu)(NMe2)4] (2), [W(NtBu)(MeNCH2CH2NMe)2] (3), [W(NtBu)(MeNCH2CH2CH2NMe)2] (4), [W(NtBu)(iPrNCH2CH2NiPr)2] (5), and [W(NtBu)(tBuNCH2CH2NtBu)2] (6) were prepared by a two-step process. First, the controlled reaction between WCl6 and N-tert-butyltrimethylsilylamine afforded the complex [W(NtBu)Cl4(py)] (1) from which the substitution of chloride ions with the corresponding amide ligands gave complexes 2–6. Single crystal X-ray crystallography showed that complex 1 crystalized in the triclinic space group P-1 with an octahedral structure. Among complexes 2–6, complexes 4 and 5 exhibited good volatility and stability.

KW - Imido

KW - Precursor

KW - Thin film

KW - Tungsten

KW - WN

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DO - 10.1002/slct.201500035

M3 - Article

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JO - ChemistrySelect

JF - ChemistrySelect

IS - 1

ER -

Synthesis of Mono-Imido Tungsten Complexes Directly from WCl₆

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Keywords

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