Temperature control of a rapid thermal processor based on receding horizon control

Y. I. Lee, J. S. Jang

Research output: Contribution to conferencePaperpeer-review

Abstract

In this paper, application of the Receding Horizon Tracking Control (RHTC) to the temperature control of a Rapid Thermal Processor (RTP) is considered. Discrete time models of the plant are identified through relay control. The control horizon of the RHTC is chosen to cover 1 sec time and weights are used to lay penalty not only on the tracking errors but also on the discrepancy of outputs. Experimental results were obtained for 8 inch RTP based on SISO models and its extension to TITO model is considered and tested for a simple test equipment.

Original languageEnglish
Pages1204-1207
Number of pages4
StatePublished - 2001
Event2001 IEEE International Symposium on Industrial Electronics Proceedings (ISIE 2001) - Pusan, Korea, Republic of
Duration: 12 Jun 200116 Jun 2001

Conference

Conference2001 IEEE International Symposium on Industrial Electronics Proceedings (ISIE 2001)
Country/TerritoryKorea, Republic of
CityPusan
Period12/06/0116/06/01

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