@inproceedings{3ba5855395284b9e90af7e97499d6063,
title = "Towards 3D metamaterials at optical frequencies",
abstract = "Recent development of hierarchical fabrication techniques for three-dimensional metamaterial and plasmonic structures based on ultra-accurate and ultra-precise electron-beam lithography overlay will be discussed in this article.",
keywords = "3D metamaterials, chiral, electron-beam lithography overlay, negative refraction, optical frequency",
author = "Gwanho Yoon and Inki Kim and Minkyung Kim and Jungho Mun and Sunae So and Junsuk Rho",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 ; Conference date: 31-07-2016 Through 04-08-2016",
year = "2016",
month = sep,
day = "13",
doi = "10.1109/OMN.2016.7565875",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings",
}