TY - GEN
T1 - Ultra-miniature monolithic FBAR filters for wireless applications
AU - Shim, Dongha
AU - Park, Yunkwon
AU - Nam, Kuangwoo
AU - Yun, Seokchul
AU - Kim, Duckhwan
AU - Ha, Byeoungju
AU - Song, Insang
PY - 2005
Y1 - 2005
N2 - This paper presents ultra-miniature monolithic transmit (Tx) filters for 1900 MHz PCS using thin film bulk acoustic resonators (FBAR) technology. Conventional FBAR filters often include multiple tuning inductors, which have prevented the miniaturization and the monolithic integration of the filters. However, the developed filter has a novel circuit configuration using a single integrated inductor to minimize the size. The FBAR block consists of seven FBARs electrically coupled in a ladder topology. A meander type inductor is used for simplicity of fabrication processes and is optimized to increase the receive (Rx) band rejection performance. The filters are hermetically packaged at a wafer-level, which enables us to achieve a size of 1.0 mm × 1.0 mm × 0.7 mm. The packaged filters showed high performance with insertion loss less than 3.3 dB and Rx band rejection over 35 dB.
AB - This paper presents ultra-miniature monolithic transmit (Tx) filters for 1900 MHz PCS using thin film bulk acoustic resonators (FBAR) technology. Conventional FBAR filters often include multiple tuning inductors, which have prevented the miniaturization and the monolithic integration of the filters. However, the developed filter has a novel circuit configuration using a single integrated inductor to minimize the size. The FBAR block consists of seven FBARs electrically coupled in a ladder topology. A meander type inductor is used for simplicity of fabrication processes and is optimized to increase the receive (Rx) band rejection performance. The filters are hermetically packaged at a wafer-level, which enables us to achieve a size of 1.0 mm × 1.0 mm × 0.7 mm. The packaged filters showed high performance with insertion loss less than 3.3 dB and Rx band rejection over 35 dB.
KW - Acoustic resonator filters
KW - Bandpass filters
KW - Bulk acoustic wave devices
KW - Thin film inductors
KW - Wafer-scale integration
UR - https://www.scopus.com/pages/publications/33749246929
U2 - 10.1109/MWSYM.2005.1516562
DO - 10.1109/MWSYM.2005.1516562
M3 - Conference contribution
AN - SCOPUS:33749246929
SN - 0780388461
SN - 9780780388468
T3 - IEEE MTT-S International Microwave Symposium Digest
SP - 213
EP - 216
BT - 2005 IEEE MTT-S International Microwave Symposium Digest
T2 - 2005 IEEE MTT-S International Microwave Symposium
Y2 - 12 June 2005 through 17 June 2005
ER -