Ultrasensitive dielectric filled Lamé mode biomass sensor

Amir Heidari; Yong Jin Yoon; Mi Kyoung Park; Woo Tae Park; Julius Tsai Ming Lin

doi:10.1109/TRANSDUCERS.2011.5969338

Ultrasensitive dielectric filled Lamé mode biomass sensor

Amir Heidari, Yong Jin Yoon, Mi Kyoung Park, Woo Tae Park, Julius Tsai Ming Lin

Dept. of Mechanical & Automotive Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

A new high performance biomass sensor is presented. The developed sensor shows a high potential to detect small biological agents compared to previous biomass sensors by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lamé bulk acoustic resonant mode at a frequency of 37.8 MHz, quality factor of 10,000 and the mass sensitivity of 400 Hz/pg. The resonators were fabricated using the silicon-on-insulator MEMS process.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	2259-2262
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969338
State	Published - 2011
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11

Keywords

Biosensor
capacitive filled gap transducer
mass sensitivity
motional resistance
quality factor

Access to Document

10.1109/TRANSDUCERS.2011.5969338

Cite this

Heidari, A., Yoon, Y. J., Park, M. K., Park, W. T., & Tsai Ming Lin, J. (2011). Ultrasensitive dielectric filled Lamé mode biomass sensor. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 2259-2262). Article 5969338 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969338

@inproceedings{ec5f740337f9430d99d2c71805290712,

title = "Ultrasensitive dielectric filled Lam{\'e} mode biomass sensor",

abstract = "A new high performance biomass sensor is presented. The developed sensor shows a high potential to detect small biological agents compared to previous biomass sensors by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lam{\'e} bulk acoustic resonant mode at a frequency of 37.8 MHz, quality factor of 10,000 and the mass sensitivity of 400 Hz/pg. The resonators were fabricated using the silicon-on-insulator MEMS process.",

keywords = "Biosensor, capacitive filled gap transducer, mass sensitivity, motional resistance, quality factor",

author = "Amir Heidari and Yoon, \{Yong Jin\} and Park, \{Mi Kyoung\} and Park, \{Woo Tae\} and \{Tsai Ming Lin\}, Julius",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969338",

language = "English",

isbn = "9781457701573",

series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

pages = "2259--2262",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

}

Heidari, A, Yoon, YJ, Park, MK, Park, WT & Tsai Ming Lin, J 2011, Ultrasensitive dielectric filled Lamé mode biomass sensor. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969338, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 2259-2262, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969338

Ultrasensitive dielectric filled Lamé mode biomass sensor. / Heidari, Amir; Yoon, Yong Jin; Park, Mi Kyoung et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2259-2262 5969338 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Ultrasensitive dielectric filled Lamé mode biomass sensor

AU - Heidari, Amir

AU - Yoon, Yong Jin

AU - Park, Mi Kyoung

AU - Park, Woo Tae

AU - Tsai Ming Lin, Julius

PY - 2011

Y1 - 2011

N2 - A new high performance biomass sensor is presented. The developed sensor shows a high potential to detect small biological agents compared to previous biomass sensors by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lamé bulk acoustic resonant mode at a frequency of 37.8 MHz, quality factor of 10,000 and the mass sensitivity of 400 Hz/pg. The resonators were fabricated using the silicon-on-insulator MEMS process.

AB - A new high performance biomass sensor is presented. The developed sensor shows a high potential to detect small biological agents compared to previous biomass sensors by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lamé bulk acoustic resonant mode at a frequency of 37.8 MHz, quality factor of 10,000 and the mass sensitivity of 400 Hz/pg. The resonators were fabricated using the silicon-on-insulator MEMS process.

KW - Biosensor

KW - capacitive filled gap transducer

KW - mass sensitivity

KW - motional resistance

KW - quality factor

UR - https://www.scopus.com/pages/publications/80052119520

U2 - 10.1109/TRANSDUCERS.2011.5969338

DO - 10.1109/TRANSDUCERS.2011.5969338

M3 - Conference contribution

AN - SCOPUS:80052119520

SN - 9781457701573

T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

SP - 2259

EP - 2262

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Y2 - 5 June 2011 through 9 June 2011

ER -

Heidari A, Yoon YJ, Park MK, Park WT, Tsai Ming Lin J. Ultrasensitive dielectric filled Lamé mode biomass sensor. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2259-2262. 5969338. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969338

Ultrasensitive dielectric filled Lamé mode biomass sensor

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Keywords

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