@inproceedings{40f12a598fd042bfaffa2343ddaea0e3,
title = "Ultrasensitive high sensitivity dielectric filled Lam{\'e} mode resonator for chemical and biological applications",
abstract = "This paper presents a mass sensitive biosensor utilizing a Lame' mode micromachined resonator. The mass sensitivity of the sensor has been investigated. A biosensor with Q value of more than 10,000 and mass sensitivity of -400Hz/ng, has been demonstrated at a resonant frequency of 37.8MHz. Frequency shift in response to additional mass is simulated in COMSOL. The obtained results show that the Lame mode micromachined resonator has a potential to be used as an alternative to the QCM biosensors.",
keywords = "Biomass sensor, Capacitive excitation, Quality factor, Sensitivity",
author = "A. Heidari and Yoon, \{Y. J.\} and Park, \{W. T.\} and \{Tsai Ming Lin\}, J.",
year = "2011",
language = "English",
isbn = "9781439871393",
series = "Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011",
pages = "365--368",
booktitle = "Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011",
note = "Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011 ; Conference date: 13-06-2011 Through 16-06-2011",
}