TY - GEN
T1 - Ultraviolet beam pattern control in second and third harmonic generation by spatial wavefront modulation of near-infrared driving wavelength
AU - Won, Seungjai
AU - Kim, Taewon
AU - Choi, Seungman
AU - Kim, Byunggi
AU - Kim, Seung Woo
AU - Lee, Joohyung
AU - Kim, Young Jin
N1 - Publisher Copyright:
© 2024 SPIE.
PY - 2024
Y1 - 2024
N2 - The ultraviolet (UV) wavelengths are gaining attention in various applications including lithography, imaging, and spectroscopy due to their high photon energy and high spatial resolution. However, the strong UV absorption has required specialized optics for beam shaping and wavefront manipulation of the UV. In this paper, a novel beam shaping of UV is demonstrated by manipulating the wavefront of a near-infrared (NIR, λ=800 nm) driving laser in harmonic generation. The preservation of spatiotemporal coherence in harmonic generation allows the transfer of the spatial beam distribution from the IR driver to the UV harmonics. To separate the UV beam from the strong NIR background, a non-collinear harmonic generation configuration is employed. By using quartz and MgO nonlinear medium, the pattern of 2nd harmonic UV (λ=400 nm) and 3rd harmonic deep-UV (λ=266 nm) waves were manipulated. Our technique allows the wavefront control of UV laser beams in UV optical metrology and patterning.
AB - The ultraviolet (UV) wavelengths are gaining attention in various applications including lithography, imaging, and spectroscopy due to their high photon energy and high spatial resolution. However, the strong UV absorption has required specialized optics for beam shaping and wavefront manipulation of the UV. In this paper, a novel beam shaping of UV is demonstrated by manipulating the wavefront of a near-infrared (NIR, λ=800 nm) driving laser in harmonic generation. The preservation of spatiotemporal coherence in harmonic generation allows the transfer of the spatial beam distribution from the IR driver to the UV harmonics. To separate the UV beam from the strong NIR background, a non-collinear harmonic generation configuration is employed. By using quartz and MgO nonlinear medium, the pattern of 2nd harmonic UV (λ=400 nm) and 3rd harmonic deep-UV (λ=266 nm) waves were manipulated. Our technique allows the wavefront control of UV laser beams in UV optical metrology and patterning.
KW - NIR driving laser
KW - Nonlinear harmonic generation
KW - Spatial phase modulation
KW - Ultraviolet beam control
UR - https://www.scopus.com/pages/publications/85190513597
U2 - 10.1117/12.3000457
DO - 10.1117/12.3000457
M3 - Conference contribution
AN - SCOPUS:85190513597
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Nonlinear Frequency Generation and Conversion
A2 - Schunemann, Peter G.
PB - SPIE
T2 - Nonlinear Frequency Generation and Conversion: Materials and Devices XXIII 2024
Y2 - 29 January 2024 through 31 January 2024
ER -